KAJIAN SIFAT OPTIK FILM TIPIS BST DIDADAH NIOBIUM DAN TANTALUM

Abstract

In this research thin films of Barium Strontium Titanate (BST) has been synthesis with different compositions Ba_0,5Sr_0,5TiO₃ and Ba_0,25Sr_0,75TiO₃ which doped by Nb₂O₅ (Niobium) and Ta₂O₅ (Tantalum) on Si (100) type-p substrate. Thin films were produced by chemical solution deposition technique (CSD) and spin coating technique with annealing temperature at 850^oC, 900^oC dan 950^oC. Rotation velocity at 3000 rpm and time of rotation is 30 seconds. Characterization of Films is optic Characterization (absorbance ana reflectance). From the Characterizations were obtained BNST thin film with 5% doping and anneling temperature at 850⁰C as photodiode light sensor which applied in electronic circuit.